文章摘要
引用本文:梁新建,郑旭东,李丹东,薛旭,万蔡辛.一种基于高线性度弓形支撑梁的新型MEMS陀螺设计[J].导航与控制,2011,(3):49-53 本文二维码信息
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一种基于高线性度弓形支撑梁的新型MEMS陀螺设计
A Novel Design of MEMS Gyroscope Based on High Linearity Bow-shaped Beam
  
DOI:
中文关键词:  微机电陀螺  弓形梁  非线性振动  高线性度
English Keywords:MEMS gyroscope  bow-shaped beam  nonlinear vibrations  high linearity
基金项目:
作者单位
梁新建 北京航天控制仪器研究所 
郑旭东 北京航天控制仪器研究所 
李丹东 北京航天控制仪器研究所 
薛旭 北京航天控制仪器研究所 
万蔡辛 北京航天控制仪器研究所 
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中文摘要:
      由于尺度效应带来的大变形问题,两端固支梁具有的硬弹簧效应将引发MEMS陀螺的非线性“达芬”振动,影响陀螺的线形度和稳定性。本文设计了一种新型高线性度弓形支撑梁,并通过数值仿真证明了弓形梁在大变形条件下也能保证力与位移转换环节间的线性关系。基于该高线性度弓形支撑梁创新性的设计了一种双级解耦MEMS陀螺,在常压下,该新型MEMS陀螺的标度因子非线性度为0.08%(FS),偏置不稳定性为14°/h,测试结果表明,高线性度弓形支撑梁能够较好的提升MEMS陀螺的线性度与稳定性。
English Summary:
      According to the large deformation due to scale effect, the hardening effect of doubly-clamped beam causes nonlinear “Duffing” vibration and affects the stability and performance of the MEMS gyroscope. A scheme of the gyroscope with a bow-shaped beam instead of the doubly-clamped beam is proposed. The numerical simulation results show that the nonlinear character of the bow-shaped beam is weakened greatly. Based on the bow-shaped beam, a high linearity MEMS gyroscope is designed and manufactured. Finally, the gyroscope is tested, the performance parameters are as follows, scale factor linearity error is 0.08%(FS), bias instability is 14°/h. The bow-shaped beam plays an important role of improving the linearity and the stability of the MEMS gyroscopes.
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