文章摘要
引用本文:林娜娜,矫灵艳,王利栓,崔莹,陈广悦.CL-208清洗剂对微晶玻璃超光滑表面低损伤清洗的影响[J].导航与控制,2019,(5):99-106 本文二维码信息
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CL-208清洗剂对微晶玻璃超光滑表面低损伤清洗的影响
Effect of CL-208 Cleaning Agent on Low-damage Cleaning for Glass-ceramics Super-smooth Surface
  
DOI:
中文关键词:  清洗剂  微晶玻璃  超光滑表面  低损伤清洗
English Keywords:cleaning agent  glass-ceramics  super-smooth surface  low-damage cleaning
基金项目:
作者单位
林娜娜 天津津航技术物理研究所天津 300308 
矫灵艳 天津津航技术物理研究所天津 300308 
王利栓 天津津航技术物理研究所天津 300308 
崔莹 天津津航技术物理研究所天津 300308 
陈广悦 天津津航技术物理研究所天津 300308 
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中文摘要:
      微晶玻璃因其良好的机械性能和较高温度下的化学稳定性而被用作激光陀螺反射镜基底材料,但两相多晶结构又使其清洗后易受腐蚀,损伤超光滑表面。通过对微晶玻璃化学稳定性进行分析,确定适宜清洗微晶玻璃超光滑表面的无腐蚀性清洗剂。通过对清洗剂体积浓度、清洗温度、清洗时间的研究,确定了清洗剂的清洗参数。根据优化后的工艺参数进行清洗,微晶玻璃超光滑表面粗糙度由清洗前的0.117nm降低到清洗后的0.061nm,接触角由清洗前的22.5°降低到清洗后的5.1°,镀膜后积分散射均值为8.0×10-6,最终获得微晶玻璃反射镜高洁净低损伤超光滑表面。
English Summary:
      Glass-ceramics is used as substrate materials for laser gyroscope mirrors because of its good mechanical properties and chemical stability at high temperature. However, the two-phase polycrystalline structure makes it easy to be corroded after cleaning, and the super-smooth surface is damaged. In order to choose the non-corrosiveness cleaning agent to clean the super-smooth surface of glass-ceramics, the chemical stability of glass-ceramics is firstly analyzed in this paper. Then, the cleaning parameters are determined by the study of the volume concentration, the cleaning temperature and the cleaning time of the cleaning agent. Thirdly, process parameters are optimized to clean the glass-ceramics. Finally, the glass-ceramics mirror is obtained with high-clean and low-damage super-smooth surface, the surface roughness decreased from 0.117nm to 0.061nm, the contact angle decreased from 22.5° to 5.1°, and the coated glass-ceramics mirror average integral scattering is 8.0×10-6.
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