文章摘要
引用本文:王帅民,孙国良,牛昊斌,李博洋,余才佳.梳状电容式微加速度计温度性能优化[J].导航与控制,2019,(4):89-94 本文二维码信息
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梳状电容式微加速度计温度性能优化
Temperature Performance Optimization of Comb-finger Capacitive Micro Accelerometer
  
DOI:
中文关键词:  微机械加速度计  温度系数  电路零位  全硅表头  封装粘胶技术
English Keywords:micromechanical accelerometer  temperature coefficient  circuit zero position  full-Silicon structure  packaging viscose technology
基金项目:
作者单位
王帅民 中国航空工业集团公司西安飞行自动控制研究所西安 710076 
孙国良 中国航空工业集团公司西安飞行自动控制研究所西安 710076 
牛昊斌 中国航空工业集团公司西安飞行自动控制研究所西安 710076 
李博洋 中国航空工业集团公司西安飞行自动控制研究所西安 710076 
余才佳 中国航空工业集团公司西安飞行自动控制研究所西安 710076 
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中文摘要:
      零偏温度漂移是影响高精度MEMS加速度计整体性能的关键指标,敏感结构机械零位的温度漂移和电路零位(电容检测电路)的温度漂移是加速度计零偏温度漂移的直接原因。分析了影响加速度计零偏温度系数的3种主要影响因素,提出了某型加速度计伺服电路温度性能测试筛选方法,有效减小了电路零位的温度漂移。采用了全硅表头,同时对表头封装粘接方式进行优化,大幅减小了表头机械零位的温度漂移。经过这些优化措施后,加速度计的温度性能得到了明显改善,零偏温度系数由1.3mg/℃减小到0.5mg/℃,零偏的常温稳定性(1h)达到0.108mg,重复性(6次)达到0.141mg。
English Summary:
      Zero-bias temperature drift is a key parameter affecting the overall performance of high precision MEMS accelerometer. The direct causes of zero-bias temperature drift of accelerometer are the temperature drift of sensitive structure mechanical zero position and the temperature drift of circuit zero position. In this paper, three main factors affecting zero-bias temperature coefficient of the accelerometer are analyzed. A method for testing and screening the temperature performance of an accelerometer servo circuit is proposed, which effectively reduces the temperature drift of the circuit zero position. A full-Silicon structure is adopted, and the packaging viscose method is optimized, which greatly reduces the temperature drift of mechanical zero position. After these optimization steps, the temperature performance of the accelerometer has been significantly improved. The zero-bias temperature coefficient is reduced from 1.3mg/℃ to 0.5mg/℃, the stability of zero bias at room temperature for 1h is 0.108mg(1σ) and the repeatability(6 times) is 0.141mg(1σ).
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