文章摘要
引用本文:毕小伟,马跃飞,杜伟,孙嵩.一种分体式石英振梁加速度计的研制[J].导航与控制,2019,(4):77-82 本文二维码信息
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一种分体式石英振梁加速度计的研制
Development of a Separated Structure Quartz Vibrating Beam Accelerometer
  
DOI:
中文关键词:  石英振梁加速度计  惯性仪表  分体式  双端固定音叉
English Keywords:quartz vibrating beam accelerometer  inertial instrument  separated structure  double-ended tuning fork
基金项目:
作者单位
毕小伟 北京航天控制仪器研究所北京 100039 
马跃飞 北京航天控制仪器研究所北京 100039 
杜伟 北京航天控制仪器研究所北京 100039 
孙嵩 北京航天控制仪器研究所北京 100039 
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中文摘要:
      加速度计作为导航制导系统的重要元件,要在严酷的条件下及系统全生命周期内保证精度、稳定性、线性度等性能指标要求,这对加速度计的研制提出了极大的挑战。介绍了一种基于振梁谐振和力频特性原理的分体式石英振梁加速度计,给出了加速度计的总体结构和简化的力学模型,并进行了受力分析,指出不能简单通过增加摆质量的厚度来提高加速度计的标度因数。阐述了用双端固定音叉结构制作石英振梁的工艺加工过程,指出铬金掩膜的制作是振梁加工的关键工序。针对振梁等效参数,电路采用具有更大增益的双门振荡器方案。最后,对加速度计进行了标定测试,标度因数为55Hz/g,量程达到±70g,4h的零偏稳定性为8.1μg。测试结果表明,双振梁推挽差分输出的设计有效改善了加速度计的零偏稳定性。
English Summary:
      As an important component of navigation and guidance system, accelerometer has to meet the requirements of accuracy, stability and linearity in harsh conditions and the whole life cycle of the system, which poses a great challenge to the development of accelerometer. In this paper, a separated structure quartz vibrating beam accelerometer(QVBA) based on quartz vibrating beam and force-frequency characteristics is introduced. The overall structure and simplified mechanical model of the accelerometer are given, and the force analysis is carried out. It is pointed out that the scale factor of the accelerometer can not be improved simply by increasing the thickness of the proof mass. Quartz vibrating beam adopts double-ended fixed tuning fork structure, and its technological process is described. It is pointed out that the manufacture of chrome-gold mask is the key process of vibrating beam processing. For the equivalent parameters of the beam, the scheme of a double-gate oscillator with larger gain is adopted in the circuit. Finally, the accelerometer is calibrated and tested. The calibration factor is 55Hz/g, the measurement range is ±70g, and the zero bias stability is 8.1μg for 4h. The test results show that the zero bias stability of the accelerometer is effectively improved by the design of push-pull differential output of the double vibration beams.
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