文章摘要
引用本文:李青松,李微,张勇猛,吴学忠,肖定邦.嵌套环MEMS陀螺研究综述[J].导航与控制,2019,(4):11-18 本文二维码信息
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嵌套环MEMS陀螺研究综述
Review of Research on MEMS Disk Resonator Gyroscope
  
DOI:
中文关键词:  嵌套环谐振陀螺  MEMS技术  角速率陀螺  研究进展  发展趋势
English Keywords:disk resonator gyroscope  MEMS technology  angular rate gyroscope  research progress  development trend
基金项目:国家自然科学基金(编号:51575521)
作者单位
李青松 国防科技大学智能科学学院长沙 410073 
李微 国防科技大学智能科学学院长沙 410073 
张勇猛 国防科技大学智能科学学院长沙 410073 
吴学忠 国防科技大学智能科学学院长沙 410073 
肖定邦 国防科技大学智能科学学院长沙 410073 
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中文摘要:
      嵌套环MEMS谐振陀螺是一种基于Coriolis效应的振动陀螺,具有结构全对称、加工鲁棒性好、电容灵敏度高、可采用传统体硅加工工艺实现批量化制造等优点,是目前最具性能潜力的微陀螺方案之一。首先阐述了嵌套环MEMS谐振陀螺的基本结构和工作原理,然后针对其在敏感结构设计及演化、品质因数提升、频率匹配技术、非线性效应与参数放大技术及零偏补偿技术等方面的发展进行了讨论,并对其在结构设计、加工技术、测控电路、新机理和新效应的应用等方面的发展进行了展望。嵌套环MEMS谐振陀螺可以实现高精度的角速率测量,具有巨大的性能潜力和较好的应用前景。
English Summary:
      The MEMS disk resonator gyroscope is a vibrating gyroscope based on Coriolis effect. It has the advantages of full structural symmetry, good processing robustness, high capacitance sensitivity, mass-produce that can be realized by traditional bulk Silicon processing technology. It is one of the most promising micro-gyroscope solutions. Firstly, the basic structure and working principle of the MEMS disk resonator gyroscope are expounded, and then the development of disk resonator gyroscope on sensitive structure design and evolution, quality factor improvement, frequency matching technology, nonlinear effect and parametric amplification technology, and zero-bias compensation technology are discussed. Then, the development of disk resonator gyroscope on the structure design, fabrication technology, readout circuits, and the application of new effects and mechanisms are prospected. High precision angular rate measurement can be achieved by the MEMS disk resonator gyroscope, and it has great performance potential and good application prospects.
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