文章摘要
引用本文:赵亭杰,穆京京,徐宇新,邢朝阳.硅微陀螺平板结构的压膜阻尼研究[J].导航与控制,2014,(4):41-46 本文二维码信息
二维码(扫一下试试看!)
硅微陀螺平板结构的压膜阻尼研究
Study on the Squeeze-film Damping of the Plate Structure of the Silicon Micro-machined Gyroscope
  
DOI:
中文关键词:  微结构仿真  平板运动  雷诺方程  压膜阻尼  阻尼孔
English Keywords:silicon micro-machined gyroscope  plate movement  Reynolds equation  squeeze-film damping  damping holes
基金项目:
作者单位
赵亭杰 北京航天时代光电科技有限公司 
穆京京 中国航天科技集团公司研发部 
徐宇新 北京航天时代光电科技有限公司 
邢朝阳 北京航天时代光电科技有限公司 
摘要点击次数: 683
全文下载次数: 0
中文摘要:
      压膜阻尼对硅微陀螺的精度具有重要影响。平板结构是硅微陀螺中一种典型结构,本文通过对雷诺方程的推导,得出平板在正弦规律小振幅刚性运动时的阻尼力解析式,并给出低频时阻尼系数的近似算法。利用Matlab和CoventorWare软件对运动平板的阻尼进行仿真计算,得出运动平板的阻尼系数和刚度系数,并分析平板参数对阻尼系数及刚度系数的影响。建立不同类型的带孔平板模型,通过比较可以看出,当阻尼孔按一定方式排列时,可以降低结构的阻尼。
English Summary:
      Squeeze-film damping can significantly affect the accuracy of the silicon micro-machined gyroscope. The plate is a typicalstructurein the silicon micro-machined gyroscope.Through the derivation of the Reynolds equation, we can get the analytic formula of the squeeze-film damping of the platewhich moves in a small amplitude sinusoidal mode and the approximation algorithm of the damping coefficient is also shown on the paper. The MATLAB and COVENTORWAREare adopted to simulate the damping of the plate,calculate the coefficient of the damping and the stiffness, and analyze the impact of the plate parameters. Moreover, three different plates with damping holes are compared, and the results show that squeeze-film dampingis decreased,when the damping holes are arrayed by a certain mode.
查看全文  查看/发表评论  下载PDF阅读器